Semiconductor Epitaxy Facility
Epitaxy equipment:
MOCVD and MBE systems for III-V family
MOCVD and MBE systems for Gallium Nitride compounds.
Supporting equipment:
•X-ray
•CV Profiler
•Photoluminescence mapping system

MOCVD and MBE systems for III-V family
MOCVD and MBE systems for Gallium Nitride compounds.
•X-ray
•CV Profiler
•Photoluminescence mapping system